Study on the Adhesion Properties of Graphene and Hexagonal Boron Nitride Monolayers in Multilayered Micro-devices by Scratch Adhesion Test

نویسندگان

چکیده

The interlayer adhesion in the multilayered micro-devices is of significant importance for their electronic properties. scratch test applied here using a micro-blade sliding under linearly increased load, combined with optical and SEM visualization, to study Al2O3/GR/SiO2/Si Al2O3/hBN/GR/SiO2/Si stacks. failure interlayers determined by critical load at which sudden change coefficient friction or jump contact acoustic emission signal observed during scratch. It was found that hBN/GR bilayer deposited on SiO2 enhanced significantly (~30%) GR/SiO2 interfacial compared GR monolayer. upper Al2O3/hBN, Al2O3/GR layers stack improved 11–15%, due thermal annealing, associated solid-state diffusion interfaces. While annealing has insufficient effect substrate SiO2/Si layers. proven as suitable fast technique control between structures, order be proposed quality fabrication process operational performances micro-/nano-devices.

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ژورنال

عنوان ژورنال: Journal of Materials Engineering and Performance

سال: 2021

ISSN: ['1544-1024', '1059-9495']

DOI: https://doi.org/10.1007/s11665-021-05877-z